Semiconductor device

ABSTRACT

A semiconductor device includes a substrate having a first area and a second area, a first transistor in the first area, a second transistor in the second area, an isolation layer between the first area and the second area, and at least one buried shield structure on the isolation layer.

BACKGROUND

1. Field

Example embodiments relate to a semiconductor device and a method ofmanufacturing a semiconductor device. More particularly, exampleembodiments relate to a nonvolatile semiconductor device including aburied shield structure, and a method of manufacturing a nonvolatilesemiconductor device having a buried shield structure.

2. Description of the Related Art

Semiconductor memory devices are generally used to store desired datatherein and to read the stored data. The semiconductor memory devicesare usually classified into volatile semiconductor memory devices andnonvolatile semiconductor memory devices. The volatile semiconductormemory device lose the stored data when an applied power is off, whilethe nonvolatile semiconductor memory devices maintain the stored dataeven though a power applied thereto is off.

A flash memory device, one of electrically erasable programmable readonly memory (EEPROM) devices, has been widely employed in variouselectronic apparatuses such as a cellular phone, a digital camera, aportable multimedia player, a USB memory device, etc. Data may be storedinto the flash memory device or may be erased from the flash memorydevice through a Fowler-Nordheim tunneling process or a hot electroninjection process.

FIG. 1 illustrates a circuit diagram of a conventional flash memorydevice. Referring to FIG. 1, the conventional flash memory device 11generally includes a row decoder 12, a memory cell array 13, a senseamplifier 14 and a source line driver (not shown).

When the flash memory device 11 is a NAND type memory device, the memorycell array 13 of the flash memory device 11 includes a plurality of wordlines WL1, WL2, WL3, WL4, WL5, WL6, WL7 and WL8, a plurality of bitlines BL1, BL2 and BLn, a plurality of string memory cells MT, andselection transistors ST1 and ST2. The string memory cells MT and theselection transistors ST1 and ST2 are electrically connected to the wordlines and the bit lines.

The row decoder 12 includes the word lines WL1 to WL8 and selection gatelines SGD and SGS. The row decoder 12 further includes peripheralcircuit decoders 16 and 17. The sense amplifier 14 can read data storedin a selected memory cell, and then can amplify the data of the selectedmemory cell. The source line driver 15 can supply source lines with apower.

The peripheral circuit decoder 17 includes high voltage transistors TR1,TR2, TR3, TR4, TR5, TR6, TR7 and TR8, whereas the memory cell array 13has cell transistors operated with a common voltage. Since the flashmemory device 11 occasionally requires a high operation voltage, thehigh voltage transistors and the cell transistors are simultaneouslyused in the flash memory device 11.

FIG. 2 illustrates a cross-sectional view of a conventional NAND typeflash memory device.

Referring to FIG. 2, the NAND type flash memory device is formed on asubstrate 10 having a cell transistor area A and a high voltagetransistor area B. Cell transistors are provided in the cell transistorarea A. Each of the cell transistors includes a first gate oxide layer17, a first gate electrode 19, and a gate mask 21. The cell transistorsare isolated by a first isolation layer 14. High voltage transistors areprovided in the high voltage transistor area B. Each of the high voltagetransistors includes a second gate oxide layer 18 and a second gateelectrode 23. The high voltage transistors are separated by a secondisolation layer 15. An insulating interlayer 24 covers the celltransistor and the high voltage transistors.

In the conventional flash memory device, electrical insulation betweenan isolation layer, a high voltage transistor, and a cell transistor maybe easily broken when a high voltage is applied to the high voltagetransistor in an operation of the flash memory device. Due to such abreakdown of electrical insulation, a punch-through leakage may becaused, thereby deteriorating electrical characteristics of the flashmemory device.

Although the second isolation layer 15 shown in FIG. 2 is relativelydeep in an attempt to ensure electrical insulation between the celltransistor and the high voltage transistor, processes for forming thefirst and the second isolation layers 14 and 15 on the substrate 10 maybe considerably complicated, because the dimensions of the firstisolation layer 14 are quite different from those of the secondisolation layer 15. Additionally, the size of the flash memory devicemay be increased when the second isolation layer 15 has a large widthand depth. Furthermore, the flash memory device may not properly operatein a reading operation and an erasing operation because the first andthe second isolation layers 14 and 15 have considerably differentdimensions.

SUMMARY

Example embodiments are therefore directed to providing a semiconductordevice and a method of making a semiconductor device, whichsubstantially overcome one or more of the problems associated with therelated art.

It is therefore an aspect of embodiments to provide a semiconductordevice including a buried shield structure between a cell area and ahigh voltage area.

It is another aspect of embodiments to provide a semiconductor devicehaving a greater breakdown voltage.

It is yet another aspect of embodiments to provide a semiconductordevice having a greater degree of integration.

It is still another aspect of embodiments to provide a method ofmanufacturing a semiconductor device having a buried shield structurethrough a simplified process.

At least one of the above and other aspects and advantages may berealized by providing a semiconductor device including a firsttransistor, a second transistor, an isolation layer and at least oneburied shield structure. The first transistor is in a first area of asubstrate. The second transistor is in a second area of the substrate.The isolation layer is between the first area and the second area. Theburied shield structure is on the isolation layer.

In example embodiments, the first transistor may include a celltransistor and the second transistor may include a high voltagetransistor

In example embodiments, the buried shield structure may include a firstpattern, a second pattern, and a third pattern sequentially formed onthe isolation layer. Each of the first and the second patterns mayinclude polysilicon, metal, and/or metal compound. For example, each ofthe first and the second patterns may include polysilicon doped withimpurities, tungsten, titanium, aluminum, tantalum, tungsten nitride,tungsten silicide, titanium nitride, titanium silicide, aluminumnitride, titanium aluminum nitride, tantalum nitride, cobalt silicide,zirconium silicide, etc. These may be used alone or in a mixturethereof.

In example embodiments, the buried shield structure may additionallyinclude a sidewall spacer on sidewalls of the first to the thirdpatterns.

In example embodiments, the third pattern may include silicon oxide,silicon nitride, and/or carbon.

In example embodiments, a plurality of buried shield structures may beon the isolation layer between the first and the second areas.

In example embodiments, the first transistor may include a tunnelinsulation layer, a floating gate, a first dielectric layer pattern, anda control gate structure having a plurality of control gates. Further,the second transistor may include a gate insulation layer, a lowerelectrode, a second dielectric layer pattern, and an upper electrodestructure having a plurality of upper electrodes. Here, the upperelectrode structure may make contact with the lower electrode throughthe second dielectric layer.

At least one of the above and other aspects may be realized by providinga semiconductor device including a substrate having a first area and asecond area, a plurality of cell transistors formed in the first area, aplurality of high voltage transistors formed in the second area, and atleast one buried shield structure disposed between adjacent high voltagetransistors.

At least one of the above and other aspects may be realized by providinga method of manufacturing a semiconductor device. In the method ofmanufacturing the semiconductor device, an isolation layer may be formedbetween a first area and a second area after providing a substratehaving the first and the second areas. A first transistor may be formedin the first area and a second transistor may be formed in the secondarea. At least one buried shield structure may be formed on theisolation layer.

In the formation of the buried shield structure according to exampleembodiments, a recess may be formed between the first and the secondareas by partially etching the isolation layer. A first conductive layermay be formed in the recess, and then a second conductive layer may beformed on the first layer. A mask may be formed on the second conductivelayer. A first pattern and a second pattern may be formed by etching thefirst the second conductive layers using the mask. A third pattern maybe formed on the second pattern by partially removing the mask. Asidewall spacer may be additionally on a sidewall of the buried shieldstructure.

In the formation of the first transistor according to exampleembodiments, a tunnel insulation layer may be formed in the first area.A floating gate may be formed on the tunnel insulation layer. A firstdielectric layer pattern may be formed on the floating gate. A controlgate structure having a plurality of control gates may be formed on thefirst dielectric layer pattern. In the formation of the secondtransistor, a gate insulation layer may be formed in the second area. Alower electrode may be formed on the gate insulation layer, and then asecond dielectric layer pattern may be formed on the lower electrode. Anupper electrode structure may be formed on the second dielectric layerpattern. The upper electrode structure may have a plurality of upperelectrodes and may make contact with the lower electrode.

In example embodiments, the first and the second patterns, the controlgate structure and the upper electrode structure may be simultaneouslyformed.

In example embodiments, an insulation layer pattern may be additionallyformed between adjacent first transistors in the first area whileforming the recess.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages will become more apparent tothose of ordinary skill in the art by describing in detail exemplaryembodiments with reference to the attached drawings, in which:

FIG. 1 illustrates a circuit diagram of a conventional flash memorydevice;

FIG. 2 illustrates a cross-sectional view of a conventional NAND typeflash memory device;

FIGS. 3 to 18 illustrate cross-sectional view of stages in a method ofmanufacturing a semiconductor device in accordance with exampleembodiments;

FIGS. 19 to 23 illustrate cross-sectional views of stages in a method ofmanufacturing a semiconductor device in accordance with exampleembodiments;

FIGS. 24 to 28 illustrate cross-sectional views of stages in a method ofmanufacturing a semiconductor device in accordance with exampleembodiments;

FIGS. 29 to 44 illustrate cross-sectional view of stages in a method ofmanufacturing a semiconductor device in accordance with exampleembodiments;

FIG. 45 illustrates a block diagram of one memory system in accordancewith example embodiments;

FIG. 46 illustrates a block diagram of another memory system inaccordance with example embodiments; and

FIG. 47 illustrates a block diagram of still another memory system inaccordance with example embodiments.

DETAILED DESCRIPTION

Korean Patent Application No. 2008-0023062, filed on Mar. 12, 2008, inthe Korean Intellectual Property Office, and entitled: “SemiconductorDevice and Method of Manufacturing a Semiconductor Device,” isincorporated by reference herein in its entirety.

Example embodiments will now be described more fully hereinafter withreference to the accompanying drawings; however, they may be embodied indifferent forms and should not be construed as limited to theembodiments set forth herein. Rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the scope of the invention to those skilled in the art.

It will be understood that when an element or layer is referred to asbeing “on,” “connected to” or “coupled to” another element or layer, itcan be directly on, connected or coupled to the other element or layeror intervening elements or layers may be present. In contrast, when anelement is referred to as being “directly on,” “directly connected to”or “directly coupled to” another element or layer, there are nointervening elements or layers present. Like or similar referencenumerals refer to like or similar elements throughout. As used herein,the term “and/or” includes any and all combinations of one or more ofthe associated listed items.

It will be understood that, although the terms first, second, third,etc., may be used herein to describe various elements, components,regions, layers, patterns and/or sections, these elements, components,regions, layers, patterns and/or sections should not be limited by theseterms. These terms are only used to distinguish one element, component,region, layer, pattern or section from another region, layer, pattern orsection. Thus, a first element, component, region, layer or sectiondiscussed below could be termed a second element, component, region,layer or section without departing from the teachings of exampleembodiments.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,”“upper” and the like, may be used herein for ease of description todescribe one element or feature's relationship to another element(s) orfeature(s) as illustrated in the figures. It will be understood that thespatially relative terms are intended to encompass differentorientations of the device in use or operation in addition to theorientation depicted in the figures. For example, if the device in thefigures is turned over, elements described as “below” or “beneath” otherelements or features would then be oriented “above” the other elementsor features. Thus, the exemplary term “below” can encompass both anorientation of above and below. The device may be otherwise oriented(rotated 90 degrees or at other orientations) and the spatially relativedescriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particularexample embodiments only and is not intended to be limiting of theinvention. As used herein, the singular forms “a,” “an” and “the” areintended to include the plural forms as well, unless the context clearlyindicates otherwise. It will be further understood that the terms“comprises” and/or “comprising,” when used in this specification,specify the presence of stated features, integers, steps, operations,elements, and/or components, but do not preclude the presence oraddition of one or more other features, integers, steps, operations,elements, components, and/or groups thereof.

Example embodiments are described herein with reference tocross-sectional illustrations that are schematic illustrations ofillustratively idealized example embodiments (and intermediatestructures) of the invention. As such, variations from the shapes of theillustrations as a result, for example, of manufacturing techniquesand/or tolerances, are to be expected. Thus, example embodiments shouldnot be construed as limited to the particular shapes of regionsillustrated herein but are to include deviations in shapes that result,for example, from manufacturing. For example, an implanted regionillustrated as a rectangle will, typically, have rounded or curvedfeatures and/or a gradient of implant concentration at its edges ratherthan a binary change from implanted to non-implanted region. Likewise, aburied region formed by implantation may result in some implantation inthe region between the buried region and the surface through which theimplantation takes place. Thus, the regions illustrated in the figuresare schematic in nature and their shapes are not intended to illustratethe actual shape of a region of a device and are not intended to limitthe scope of the invention.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which this invention belongs. It will befurther understood that terms, such as those defined in commonly useddictionaries, should be interpreted as having a meaning that isconsistent with their meaning in the context of the relevant art andwill not be interpreted in an idealized or overly formal sense unlessexpressly so defined herein.

According to example embodiments, discussed in detail below, asemiconductor device may include at least one buried shield structureformed on a predetermined portion of the substrate. The buried shieldstructure may be positioned adjacent to a high voltage transistor of thesemiconductor device or may be located between the high voltagetransistor and a cell transistor of the semiconductor device. Such asemiconductor device may have improved electrical characteristicswithout electrical failure such as breakdown, leakage current, etc.Additionally, such a semiconductor device may ensure a high integrationdegree due to the buried shield structure. Furthermore, a semiconductordevice including buried shield structure may be easily manufactured bysimplified processes because the buried shield structure may be formedtogether with the cell transistors and the high voltage transistors.

FIGS. 3 to 18 illustrate cross-sectional views of stages in a method ofmanufacturing a semiconductor device in accordance with exampleembodiments. In FIGS. 3 to 18, “I” represents a first area of asubstrate 100 and “II” indicates a second area of the substrate 100. Forexample, first transistors, e.g., cell transistors of a memory cellarray, may be formed in the first area I of the substrate 100, andsecond transistors, e.g., high voltage transistors of a peripheralcircuit decoder, may be formed in the second area II of the substrate100. Although FIGS. 3 to 18 illustrate a method of manufacturing a flashmemory device, the features and advantages of the invention may beemployed in other nonvolatile semiconductor devices or volatilesemiconductor devices.

Referring to FIG. 3, a first insulation layer 105 may be formed on thesubstrate 100 having the first and the second areas I and II. The firstinsulation layer 105 may correspond to a tunnel insulation layer when aflash memory device is to be provided on the substrate 100.

The substrate 100 may include a semiconductor substrate, e.g., a singlecrystalline silicon (Si) substrate, a single crystalline germanium (Ge)substrate, a silicon-germanium (Si—Ge) substrate, etc. The substrate 100may include a silicon-on-insulator (SOI) substrate, agermanium-on-insulator (GOI) substrate, etc.

In example embodiments, impurities may be doped into the first and thesecond areas I and II to form desired wells in the substrate 100 inaccordance with electrical characteristics of cell transistors and highvoltage transistors to be formed thereon. For example, P type and N typeimpurities may be implanted into the first and the second areas I and IIto form a P type well and an N type well in the first area I and thesecond area II, respectively.

The first insulation layer 105 may include an oxide and/or a metaloxide. For example, the first insulation layer 105 may be formed usingsilicon oxide (SiOx), hafnium oxide (HfOx), zirconium oxide (ZrOx),tantalum oxide (TaOx), aluminum oxide (AlOx), etc. These may be usedalone or in a mixture thereof. The first insulation layer 105 may beformed by a radical oxidation process, a chemical vapor deposition (CVD)process, an atomic layer deposition (ALD) process, a sputtering process,a pulsed laser deposition (PLD) process, etc.

In example embodiments, the first insulation layer 105 may have athickness of about 50 Å to about 100 Å based on an upper face of thesubstrate 100 in case that the first insulation layer 105 serves as thetunnel insulation layer in the flash memory device. When the firstinsulation layer 105 is obtained by the radical oxidation process, thefirst insulation layer 105 may sufficiently ensure a desired structureand electrical characteristics for the tunnel insulation layer in theflash memory device.

A first conductive layer 110 may be formed on the first insulation layer105. The first conductive layer 110 may be formed using polysilicon, ametal, and/or a metal compound. For example, the first conductive layer110 may include polysilicon doped with impurities, a metal such astungsten (W), titanium (Ti), aluminum (Al), tantalum (Ta), etc., a metalcompound such as tungsten nitride (WNx), tungsten silicide (WSix),titanium nitride (TiNx), titanium silicide (TiSix), aluminum nitride(AlNx), titanium aluminum nitride (TiAlxNy), tantalum nitride (TaNx),cobalt silicide (CoSix), zirconium silicide (ZrSix), etc. These may beused alone or in a mixture thereof. The first conductive layer 110 maybe formed by a CVD process, an ALD process, a plasma enhanced chemicalvapor deposition (PECVD) process, a sputtering process, a PLD process,an evaporation process, etc. In one example embodiment, the firstconductive layer 110 may be formed by a PECVD process using polysiliconwhen the flash memory device is to be formed on the substrate 100.

In example embodiments, the first conductive layer 110 may be patternedto form a floating gate 111 (see FIG. 4) in the cell transistor of theflash memory device. The first conductive layer 110 may have a thicknessof about 500 Å to about 1,500 Å measured from an upper face of the firstinsulation layer 105. In forming the first conductive layer 110, a firstconductive film may be formed on the first insulation layer 105 and asecond conductive film may be formed on the first conductive film. Thatis, the first conductive layer 110 may have a multilayer structure toensure improved electrical characteristics. Here, the first conductivefilm may have a thickness of about 200 Å to about 500 Å and the secondconductive film may have a thickness of about 300 Å to about 1,000 Å.

A hard mask layer 115 may be provided on the first conductive layer 110.The hard mask layer 115 may be formed using a material that has anetching selectivity relative to the first conductive layer 110, thefirst insulation layer 105, and the substrate 100. For example, the hardmask layer 115 may include a nitride, e.g., silicon nitride (SiNx), oran oxynitride, e.g., silicon oxynitride (SiOxNy) or titanium oxynitride(TiOxNy). Alternatively, the hard mask layer 115 may have a multilayerstructure that includes an oxide film, a nitride film, an organicmaterial film, and/or an oxynitride film. For example, the hard masklayer 115 may include an oxide film, a lower nitride film, an organicmaterial film and an upper nitride film.

Referring to FIG. 4, a first hard mask 116 and a second hard mask 117may be provided on the first conductive layer 110, e.g., by partiallyetching the hard mask layer 115. The first hard mask 116 may be locatedin the first area I of the substrate 100. The second hard mask 117 maybe located in the second area II of the substrate 100. The second hardmask 117 may have a width substantially larger than that of the firsthard mask 116 when the high voltage transistor is to be formed in thesecond area II of the substrate 100. The first and the second hard masks116 and 117 may be obtained on the first conductive layer 110 by aphotolithography process.

Using the first and the second hard masks 116 and 117 as etching masks,the first conductive layer 110 and the first insulation layer 105 may bepartially etched. Thus, the floating gate 111, a lower electrode 112, atunnel insulation layer 106, and a gate insulation layer 107 are formedon the substrate 100. Here, the tunnel insulation layer 106 and thefloating gate 111 may be provided in the first area I, whereas the gateinsulation layer 107 and the lower electrode 112 may be provided in thesecond area II. Therefore, a first conductive structure and a secondconductive structure are provided in the first area I and the secondarea II, respectively. The first conductive structure may include thetunnel insulation layer 106, the floating gate 111, and the first hardmask 116. The second conductive structure may include the gateinsulation layer 107, the lower electrode 112, and the second hard mask117. The first and the second hard masks 116 and 117 may be removed fromthe first and the second conductive structures as occasion demands.

In example embodiments, the tunnel insulation layer 106 and the floatinggate 111 may have widths substantially smaller than those of the gateinsulation layer 107 and the lower electrode 112, respectively. Further,the floating gate 111 and the lower electrode 112 may be simultaneouslyformed by performing one etching process even though the floating gate111 may have dimensions substantially different from those of the lowerelectrode 112. Thus, processes for manufacturing the semiconductordevice, e.g., the flash memory device, may be simplified.

Referring to FIG. 5, the substrate 100 may be partially etched using thefirst and the second conductive structures as etching masks, so that afirst trench (filled), a second trench (filled), and a third trench(filled) are formed on the substrate 100. The first trench may bebetween adjacent first conductive structures in the first area I. Thesecond trench may be between adjacent second conductive structures inthe second area II. Further, the third trench may be between the firstarea I and the second area II. That is, the third trench may be locatedbetween an outermost first conductive structure and an outermost secondconductive structure. The second trench may have a width substantiallylarger than that of the first trench and the third trench may have awidth substantially the same as or substantially similar to that of thesecond trench. Hence, the width of the third trench may be substantiallywider than that of the first trench. However, the first trench may havea depth substantially the same as, or substantially similar to, those ofthe second and the third trenches.

In example embodiments, each of the first to the third trenches may havean inclined sidewall with respect to the substrate 100. When the firstto the third trenches have the inclined sidewalls, stresses generatedbetween the substrate 100 and an isolation layer or isolation layerpatterns may be reduced. Each of the first to the third trenches mayhave a depth of about 2,000 Å to about 4,000 Å measured from the upperface of the substrate 100. However, the depths of the first to the thirdtrenches may vary in accordance with electrical characteristics and/ordimensions of the flash memory device to be formed.

A first isolation layer 120, a second isolation layer 121, and a thirdisolation layer 122 may be formed on the substrate 100 to fill up thefirst trench, the second trench, and the third trench, respectively.Each of the first to the third isolation layers 120, 121 and 122 may beformed by a shallow trench isolation (STI) process, a thermal oxidationprocess, a CVD process, a high density plasma-chemical vapor deposition(HDP-CVD) process, etc. Additionally, the first to the third isolationlayers 120, 121 and 122 may be formed using an oxide, e.g., undopedsilicate glass (USG), spin on glass (SOG), phosphor silicate glass(PSG), boro-phosphor silicate glass (BPSG), flowable oxide (FOX), tonensilazene (TOSZ), tetraethyl ortho silicate (TEOS), plasmaenhanced-tetraethyl ortho silicate (PE-TEOS), HDP-CVD oxide, etc. Thesemay be used alone or in a mixture thereof.

In example embodiments, the first isolation layer 120 may electricallyinsulate adjacent cell transistors in the first area I, and the secondisolation layer 121 may electrically insulate adjacent high voltagetransistors in the second area II. Further, the third isolation layer122 may electrically insulate the cell transistor from the high voltagetransistor between the first and the second areas I and II.

After a second insulation layer 125 is formed on the substrate 100 tocover the first and the second conductive structures, the secondinsulation layer 125 may be partially removed until the first and thesecond hard masks 116 and 117 are exposed. The second insulation layer125 may be partially removed by a chemical mechanical polishing (CMP)process and/or an etch-back process. The second insulation layer 125 maybe formed using an oxide, e.g., silicon oxide. Examples of silicon oxidein the second insulation layer 125 may include HDP-CVD oxide, USG, SOG,PSG, BPSG, FOX, TOSZ, TEOS, PE-TEOS, etc. Further, the second insulationlayer 125 may be obtained by a CVD process, a low pressure chemicalvapor deposition (LPCVD) process, a spin coating process, a PECVDprocess, an HDP-CVD process, etc.

In example embodiments, field impurities may be doped into portions ofthe substrate 100 where the first to the third trenches are to be formedbefore forming the first to the third trenches on the substrate 200.Thus, electrical insulation characteristics of the first to the thirdisolation layers 120, 121 and 122 may be enhanced due to the fieldimpurities.

Referring to FIG. 6, the second insulation layer 125 may be etched toform an upper insulation layer 126 on the substrate 100. The upperinsulation layer 126 may cover lower sidewalls of the floating gate 111and the lower electrode 112 in the first and the second areas I and II.Further, the upper insulation layer 126 may cover the third isolationlayer 122 filling the third trench between the first and the secondareas I and II. After the formation of the upper insulation layer 126,sidewalls of the first and the second conductive structures may beexposed in the first and the second areas I and II.

Referring to FIG. 7, a spacer formation layer 130 may be formed on theupper insulation layer 126 to cover the first and the second conductivestructures in the first and the second areas I and II. The spacerformation layer 130 may be formed using an oxide or an oxynitride. Forexample, the spacer formation layer 130 may include middle temperatureoxide (MTO) or silicon oxynitride. Further, the spacer formation layer130 may be formed by a CVD process, an LPCVD process, a PECVD process,an HDP-CVD process, etc.

In example embodiments, a gap between adjacent first conductivestructures in the first area I may be filled with the spacer formationlayer 130 when the spacer formation layer 130 has a sufficientthickness. For example, the gap between adjacent first conductivestructures may be filled when the spacer formation layer 130 has athickness substantially larger than a half of a width of the gap betweenadjacent first conductive structures in the first area I. When thespacer formation layer 130 fills up the gap between adjacent firstconductive structures in the first area I, a recess 134 (see FIG. 8) maybe formed between the first area I and the second area II by etching thespacer formation layer 130.

Referring to FIG. 8, the spacer formation layer 130 may be etched toform a first spacer 131 and a sacrificial spacer 132. The first and thesacrificial spacers 131 and 132 may be positioned to enclose the lowersidewalls of the first and the second conductive structures,respectively. While etching the spacer formation layer 130, the secondisolation layer 121 and the third isolation layer 122 may be partiallyetched, so that a second isolation layer pattern 123 and a thirdisolation layer pattern 124 are formed in the second trench and thethird trench, respectively. Further, the upper insulation layer 126 maybe simultaneously etched to form a first upper insulation layer pattern127, a second upper insulation layer pattern 129, and a third upperinsulation layer pattern 128. The second and the third isolation layerpatterns 123 and 124 may be positioned on lower faces and sidewalls ofthe second and the third trenches, respectively.

In example embodiments, the first upper insulation layer pattern 127 maybe positioned between adjacent first conductive structures in the firstarea I. Further, the first upper insulation layer pattern 127 may coverthe first isolation layer 120 and the first spacer 131. Lateral portionsof the first upper insulation layer pattern 127 may be positionedbeneath adjacent first spacers 131, whereas a central portion of thefirst upper insulation layer pattern 127 may be exposed between adjacentfirst spacers 131. Since the spacer formation layer 130 has a thicknesssufficient to fill up the gap between the first conductive structures inthe first area I, the first upper insulation layer pattern 127 may havea dent or a recess at the central portion thereof after etching thespacer formation layer 130.

One of lateral portions of the second upper insulation layer pattern 129may be formed between the second isolation layer pattern 123 and thesacrificial spacer 132. The other of the lateral portions of the secondupper insulation layer pattern 129 may be positioned between the thirdisolation layer pattern 124 and the sacrificial spacer 132 formed on alower sidewall of the outermost second conductive structure in thesecond area II. The third upper insulation layer pattern 128 may be alsoformed between the third isolation layer pattern 124 and the firstspacer 131 positioned on a lower sidewall of the outermost firstconductive structure in the first area I.

In example embodiments, each of the second and the third upperinsulation layer patterns 129 and 128 may have a width substantially thesame as, or substantially similar to, those of the first and thesacrificial spacers 131 and 132. Further, each of the second and thethird isolation layer patterns 123 and 124 may have a widthsubstantially the same as, or substantially similar to, those of thesecond and the third upper insulation layer patterns 129 and 128.

In example embodiments, the first and the sacrificial spacers 131 and132 may increase a coupling ratio of the flash memory device. Thecoupling ratio of the flash memory device may mainly depend on theamount of charge between the floating gate 111 and a control gatestructure 170 (see FIG. 15) of the flash memory device. Thus, thecoupling ratio of the flash memory device may increase accordingly as anarea between the floating gate 111 and the control gate structure 170increases. When the first and the sacrificial spacers 131 and 132 arepositioned on the lower sidewalls of the first and the second conductivestructures, the flash memory device may have an increased coupling ratioin comparison with that of the conventional flash memory device.

Referring to FIG. 9, a dielectric layer 135 may be formed on theresultant structures to cover the floating gate 111 and the lowerelectrode 112 after removing the first and the second masks 116 and 117from the floating gate 111 and the lower electrode 112. In addition, thedielectric layer 135 may cover the first spacer 131, the sacrificialspacer 132, and the first to the third upper insulation layer patterns127, 129 and 128.

In example embodiments, the dielectric layer 135 may be formed using amaterial that increases the coupling ratio of the flash memory device.When the dielectric layer 135 includes a material having a dielectricconstant substantially larger than those of the tunnel insulation layer106 and the gate insulation layer 106, the flash memory device may havea considerably increased coupling ratio. Therefore, the dielectric layer135 may be formed using a metal compound, e.g., hafnium oxide (HfOx),aluminum oxide (AlOx), tantalum oxide (TaOx), zirconium oxide (ZrOx),etc. Alternatively, the dielectric layer 135 may have a multilayerstructure that includes a lower oxide film, a nitride film and an upperoxide film. The dielectric layer 135 may have a thickness of about 100 Åto about 200 Å. The dielectric layer 135 may be conformally formed alongprofiles of the resultant structures on the substrate 100.

Referring to FIG. 10, a second conductive layer 140 may be formed on thedielectric layer 135. The second conductive layer 140 may also beconformally formed on the dielectric layer 135 along the profiles of theresultant structures on the substrate 100. The second conductive layer140 may be formed using polysilicon, a metal, and/or a metal compound.For example, the second conductive layer 140 may include polysilicondoped with impurities, tungsten, titanium, aluminum, tantalum, tungstennitride, tungsten silicide, titanium nitride, titanium silicide,aluminum nitride, titanium aluminum nitride, tantalum nitride, cobaltsilicide, zirconium silicide, etc. These may be used alone or in amixture thereof. Further, the second conductive layer 140 may be formedby a CVD process, an ALD process, a PECVD process, a sputtering process,a PLD process, an evaporation process, etc. The second conductive layer140 may have a thickness of about 500 Å to about 1,000 Å based on anupper face of the dielectric layer 135. In one example embodiment, thesecond conductive layer 140 may be formed using polysilicon by a PECVDprocess.

Referring to FIG. 11, a first butting mask 145 and a second butting mask146 may be provided on the second conductive layer 140 in the first andthe second areas I and II. The first butting mask 145 may cover thefirst conductive structures in the first area I. The second butting mask146 may partially cover the second conductive structures in the secondarea II, e.g., a central portion of the second conductive structure maybe exposed through the second butting mask 146. That is, a portion ofthe second conductive layer 140 may be exposed by the second buttingmask 146. Further, a portion of the second conductive layer 140 betweenthe first and the second areas I and II may be exposed after formationof the first and the second butting masks 145 and 146. Particularly, theportion of the second conductive layer 140 over the third isolationlayer pattern 124 may be exposed when the first and the second buttingmasks 145 and 146 are formed.

Using the first and the second butting masks 145 and 146 as etchingmasks, the second conductive layer 140 and the dielectric layer 135 maybe partially removed from the third isolation layer pattern 124.Further, portions of the second conductive layer 140, the dielectriclayer 135, and the lower electrode 112 in the second area II may beetched while partially removing the second conductive layer 140 and thedielectric layer 135. Hence, a first dielectric layer pattern 136 and afirst control gate 141 may be formed in the first area I, and apreliminary second dielectric layer pattern 137 and a first upperelectrode 142 may be provided in the second area II. When the lowerelectrode 112 is partially etched, a dent or a recess may be provided onthe lower electrode 112.

In example embodiments, the first dielectric layer pattern 136 may coverthe floating gate 111, the first spacer 131, and the first insulationlayer pattern 127 in the first area I. Further, the first dielectriclayer pattern 136 may cover all of the floating gates, the firstspacers, and the first insulation layer pattern in the first area I.That is, the cell transistors in the first area I may share one commonfirst dielectric layer pattern 136. Similarly, the cell transistors mayalso share one first control gate 141 formed on the first dielectriclayer pattern 136. However, the high voltage transistors in the secondarea II may not share one common dielectric layer pattern. That is, thepreliminary second dielectric layer pattern 137 may be separated fromthe adjacent preliminary second dielectric layer pattern. Thepreliminary second dielectric layer pattern 137 may cover thesacrificial spacer 132 and the lower electrode 112, and the first upperelectrode 142 may be positioned on the preliminary second dielectriclayer pattern 137.

In the reading and the erasing operations of the semiconductor device tobe formed, the charges may not be stored into the lower electrode 112 ofthe second conductive structure, so that the lower electrode 112 and thefirst upper electrode 142 may make contact with upper electrodessuccessively formed.

Referring to FIG. 12, the first and the second butting masks 145 and 146may be removed from the first control gate 141 and the first upperelectrode 142. Then, a third conductive layer 150 may be formed on thefirst control gate 141, the third isolation layer pattern 124, and thefirst upper electrode 142. The third conductive layer 150 may fill upthe dent or the recess exposing the lower electrode 112, so that thethird conductive layer 150 may make contact with the lower electrode112.

The third conductive layer 150 may be formed using polysilicon, a metaland/or a metal compound. For example, the third conductive layer 150 mayinclude polysilicon doped with impurities, tungsten, titanium, aluminum,tantalum, tungsten nitride, tungsten silicide, titanium nitride,titanium silicide, aluminum nitride, titanium aluminum nitride, tantalumnitride, cobalt silicide, zirconium silicide, etc. These may be usedalone or in a mixture thereof. Additionally, the third conductive layer150 may be formed by a CVD process, an ALD process, a PECVD process, asputtering process, a PLD process, an evaporation process, etc. Thethird conductive layer 150 may have a thickness of about 500 Å to about1,000 Å.

In example embodiments, the third conductive layer 150 may include amaterial substantially the same as or substantially similar to that ofthe second conductive layer 140 and/or that of the first conductivelayer 110. Alternatively, the first to the third conductive layers 110,140 and 150 may be formed using different materials, respectively.

Referring to FIG. 13, a fourth conductive layer 155 may be formed on thethird conductive layer 150. The third and the fourth conductive layers150 and 155 may be conformally formed along profiles of the resultantstructures on the substrate 100. The fourth conductive layer 155 may beformed using a metal and/or a metal compound. For example, the fourthconductive layer 155 may include tungsten, tungsten silicide, titanium,titanium silicide, cobalt silicide, zirconium silicide, etc. These maybe used alone or in a mixture thereof. The fourth conductive layer 155may be formed by a CVD process, a PECVD process, a sputtering process, aPLD process, an evaporation process, etc.

In one example embodiment, the fourth conductive layer 155 may have amultilayer structure that includes a tungsten film and a tungstensilicide film. The fourth conductive layer 155 may have a thickness ofabout 500 Å to about 1,000 Å measured from an upper face of the thirdconductive layer 150.

In example embodiments, a thermal treatment process may be performedabout the substrate 100 having the fourth conductive layer 155, thethird conductive layer 150, and the lower electrode 112. The thermaltreatment process may improve adhesion strengths between the fourthconductive layer 155 and the third conductive layer 150, and between thefourth conductive layer 155 and the lower electrode 112. Further,contact resistances among the fourth conductive layer 155, the thirdconductive layer 150 and the lower electrode 112 may be reduced by thethermal treatment process. The thermal treatment process may be executedat a temperature below about 850° C. under an atmosphere includingnitrogen.

Referring to FIG. 14, a mask layer 160 may be formed on the fourthconductive layer 155. The mask layer 160 may have a sufficient thicknessto completely fill up the recess 134 over the third isolation layerpattern 124 between the first and the second areas I and II. The masklayer 160 may be formed using an oxide, a nitride, and/or an organicmaterial. For example, the mask layer 160 may include silicon oxide,silicon nitride, carbon, etc. Further, the mask layer 160 may be formedby a CVD process, a PECVD process, an HDP-CVD process, etc.

In example embodiments, the mask layer 160 may have a multilayerstructure. For example, the mask layer 160 may include an oxide film, acarbon film, and a nitride film. The oxide film may have a thickness ofabout 2,000 Å to about 3,000 Å. The carbon film may also have athickness of about 2,000 Å to about 3,000 Å. The nitride film may have athickness of about 500 Å to about 1,000 Å. The nitride film may alsoserve as an antireflective layer. The mask layer 160 may be planarizedby a planarization process to ensure a level upper face thereof. Forexample, the mask layer 160 may be planarized by a CMP process and/or anetch-back process.

A first photoresist pattern 165, a second photoresist pattern 166, and athird photoresist pattern 167 may be formed on the mask layer 160. Thefirst to the third photoresist patterns 165, 166 and 167 may be formedby a photolithography process. The first photoresist pattern 165 may beon a first portion of the mask layer 160 in the first area I. The secondphotoresist pattern 166 may be on a second portion of the mask layer 160in the second area II. The third photoresist pattern 167 may be on athird portion of the mask layer 160 between the first and the secondareas I and II.

Referring to FIG. 15, the mask layer 160 may be etched using the firstto the third photoresist patterns 165, 166 and 167 as etching masks, sothat a first mask 161, a second mask 162, and a third mask 163 areprovided on the fourth conductive layer 155. The first mask 161 may beon a first portion of the fourth conductive layer 155 in the first areaI. The second mask 162 may be on a second portion of the fourthconductive layer 155 in the second area II. The third mask 163 ispositioned on a third portion of the fourth conductive layer 155 betweenthe first area I and the second area II. As a result, gate structuresmay be provided in the second area II while forming the cell transistorsin the first area I. Each gate structure may include the first upperelectrode 142, the second dielectric layer pattern 137, the lowerelectrode 112, and the gate insulation layer 107.

In example embodiments, the first mask 161 may have a widthsubstantially larger than those of the second and the third masks 162and 163. Further, the second mask 162 may also have a widthsubstantially wider than that of the third mask 163.

Using the first to the third masks 161, 162 and 163 as etching masks,the fourth conductive layer 155 and the third conductive layer 150 maybe etched to form a control gate structure 170, an upper electrodestructure 172, and a preliminary buried shield structure 173. Thecontrol gate structure 170 may be formed on the first dielectric layerpattern 136 in the first area I. The upper electrode structure 172 maybe on the lower electrode 112 and the second dielectric layer pattern137 in the second area II. The preliminary buried shield structure 173may be on the third isolation layer pattern 124, and between the firstand the second areas I and II.

The control gate structure 170 may include the first control gate 141, asecond control gate 151, and a third control gate 156. The second andthe third control gate 151 and 156 may be formed by partially etchingthe third and the fourth conductive layers 150 and 155, respectively. Asdescribed above, the cell transistors may share the second control gate151 and the third control gate 156.

The upper electrode structure 172 may include the first upper electrode142, a second upper electrode 152, and a third upper electrode 157. Thesecond and the third upper electrodes 152 and 157 may be formed bypartially etching the third and the fourth conductive layers 150 and155. Since the first upper electrode 142 contacts the lower electrode112, the upper electrode structure 172 may be electrically connected tothe lower electrode 112.

The preliminary buried shield structure 173 may include a first pattern153, a second pattern 158, and the third mask 163. The first pattern 153may be positioned on the third isolation layer pattern 124. The firstpattern 153 and the second pattern 158 may be formed by etching thethird conductive layer 150 and the fourth conductive layer 155,respectively. Thus, the preliminary buried shield structure 173 may beformed at the same time as the cell transistors and the high voltagegate structures, such that the preliminary buried shield structure 173may be obtained without any additional processes.

In example embodiments, the sacrificial spacer 132 and the second upperinsulation layer pattern may be are removed in the formation of the highvoltage structures in the second area II. Further, widths of the lowerelectrode 112, the second dielectric layer pattern 137, and the firstupper electrode 142 may be reduced when the lower electrode 112, thesecond dielectric layer pattern 137, and the first upper electrode 142are etched while forming the gate structures in the second area II.

Referring to FIG. 16, the third mask 163 of the preliminary buriedshield structure 173 may be partially removed to form a third pattern164 on the second pattern 158. When the third mask 163 includes a carbonfilm and a nitride film, the carbon and the nitride films may be removedto form the third pattern 164 having a thickness considerably smallerthan that of the third mask 163. Thus, a buried shield structure 174 mayhave a considerably reduced height compared to the preliminary buriedshield structure 173.

A second spacer 171 may be formed on a sidewall of the high voltage gatestructure in the second area II, and a sidewall spacer 176 may be formedon a sidewall of the preliminary buried shield structure 173. Thus, theburied shield structure 174 having a sidewall spacer may be providedbetween the first and the second areas I and II while forming the highvoltage transistors in the second area II. The high voltage transistormay include the gate insulation layer 107, the lower electrode 117, thesecond dielectric layer pattern 137, the upper electrode structure 172,the second mask 162, and the second spacer 171.

In example embodiments, the buried shield structure 174 may include thefirst pattern 153, the second pattern 158, the third pattern 164, andthe sidewall spacer 176. The second spacer 171 and the sidewall spacer176 may be formed using a nitride or an oxynitride. For example, thesecond and the sidewall spacers 171 and 176 may include silicon nitrideor silicon oxynitride. Alternatively, the second and the sidewallspacers 171 and 176 may be formed using an oxide, e.g., silicon oxide.For example, the second and the sidewall spacers 171 and 176 may includemiddle temperature oxide.

Referring to FIG. 17, an etch stop layer 175 may be formed on thesubstrate 100 to cover the cell transistors, the buried shield structure174 and the high voltage transistor. The etch stop layer 175 may beconformally formed on the second and the third isolation layer patterns123 and 124 along profiles of the cell transistors, the buried shieldstructure 174, and the high voltage transistor.

In example embodiments, the etch stop layer 175 may be formed using anitride, e.g., silicon nitride. The etch stop layer 175 may have athickness of about 200 Å to about 500 Å.

An insulation interlayer 180 may be formed on the etch stop layer 175 tocompletely cover the buried shield structure 174, the high voltagetransistors, and the cell transistors. The insulation interlayer 180 maybe formed using silicon oxide by a CVD process, an LPCVD process, aPECVD process, an HDP-CVD process, etc. For example, the insulationinterlayer 180 may be formed using USG, SOG, TEOS, PE-TEOS, PSG, BPSG,FOX, TOSZ, HDP-CVD oxide, etc.

In example embodiments, the insulation interlayer 180 may have amultilayer structure. In the formation of the insulation interlayer 180,a first oxide film may be formed on the etch stop layer 175 and a secondoxide film may be formed on the first oxide film. The first oxide filmmay have a thickness of about 1,000 Å to about 2,000 Å and the secondoxide film may have a thickness off about 4,000 Å to about 6,000 Å. Eachof the first and the second oxide films may be formed by an HDP-CVDprocess. When the insulation interlayer 180 has the multilayerstructure, the insulation interlayer 180 may effectively cover the celltransistors, the buried shield structure 174, and the high voltagetransistors, without having voids or seams therein.

Referring to FIG. 18, the insulation interlayer 180 and the etch stoplayer 175 may be partially etched to form a first contact hole (filled)in the second area II. Additionally, the insulation interlayer 180, theetch stop layer 175, and the third pattern 164 may be partially etchedto form a second contact hole (filled) between the first and the secondareas I and II. The first contact hole may expose a portion of thesecond area II adjacent to the high voltage transistor. For example, thefirst contact hole may expose source/drain regions of the high voltagetransistor. The second contact hole may expose the second pattern 164 ofthe buried shield structure 174.

An upper conductive layer (not illustrated) may be formed on theinsulation interlayer 180 to fill up the first and the second contactholes. The upper conductive layer may be formed using a metal and/or ametal compound. For example, the upper conductive layer may includealuminum, copper, titanium, tungsten, aluminum nitride, tungstennitride, titanium nitride, etc. These may be used alone or in a mixturethereof. The upper conductive layer may be formed by a CVD process, asputtering process, a PECVD process, a PLD process, an evaporationprocess, etc.

The upper conductive layer may be removed until the insulationinterlayer 180 is exposed, so that a first contact 185 and a secondcontact 186 are formed in the first contact hole and the second contacthole, respectively. In some example embodiments, upper conductive linesmay be provided on the insulation interlayer 180 while forming the firstand the second contacts 185 and 186.

According to example embodiments, the buried shield structure 174 may beformed between the first area I and the second area II, so that aninversion of the semiconductor device may be prevented to improveelectrical characteristics of the semiconductor device. That is, thebreakdown of the flash memory device may be effectively prevented toenhance the electrical characteristics of the flash memory devicebecause the buried shield structure 174 is positioned between the celltransistor and the high voltage transistor.

FIGS. 19 to 23 illustrate cross-sectional views of stages in a method ofmanufacturing a semiconductor device in accordance with exampleembodiments. In the method of the semiconductor device illustrated inFIGS. 19 to 23, processes up to formation of a mask layer 260 aresubstantially the same as, or substantially similar to, those describedwith reference to FIGS. 1 to 13, and details thereof will not berepeated.

Referring to FIG. 19, a first photoresist pattern 266, a secondphotoresist pattern 267, and third photoresist patterns 268 may beprovided on the mask layer 260. The first photoresist pattern 266 maycover the first area I of a substrate 200, and the second photoresistpattern 267 may partially cover the second area II of the substrate 200.The third photoresist patterns 268 may be positioned between the firstand second areas I and II.

In example embodiments, the mask layer 260 may have a multilayerstructure. For example, the mask layer 260 may include an oxide filmformed on the fourth conductive layer 255, an organic material filmformed on the oxide film, and a nitride film formed on the organic film.The oxide film may be formed using silicon oxide by a PECVD process oran HDP-CVD process. The oxide film may have a thickness of about 2,000 Åto about 3,000 Å. The organic material film may include carbon obtainedby a CVD process. The organic material film may have a thickness ofabout 2,000 Å to about 3,000 Å. The nitride film may be formed usingsilicon nitride obtained by a CVD process or a PECVD process. Thenitride film may have a thickness of about 300 Å to about 500 Å.

The first photoresist pattern 266 may have a width substantially largerthan that of the second photoresist pattern 267 and those of each of thethird photoresist patterns 268. Further, the second photoresist pattern267 may also have a width substantially larger than those of the thirdphotoresist patterns 268. Two third photoresist patterns 268 may beformed on the mask layer 260 when two buried shield structures 274 (seeFIG. 21) are to be formed between the first and the second area I andII.

Referring to FIG. 20, the mask layer 260 may be partially etched usingthe first to the third photoresist patterns 266, 267 and 268, so that afirst mask 261, a second mask 262, and two third masks 263 are formed onthe fourth conductive layer 255. In an etching process for forming thefirst to the third masks 261, 262, and 263, an etching end point may bedetermined based on exposure of the substrate 200 or a second isolationlayer pattern 223 and a third isolation layer pattern 224. That is, theetching process may be stopped when the second and the third isolationlayer patterns 223 and 224 are exposed or when the substrate 200 isexposed.

The first mask 261 may cover cell gate structures in the first area I.Each cell gate structure may include a tunnel insulation layer 206, afloating gate 211, a first dielectric layer pattern 236, a first spacer231, and a first control gate 241.

The second mask 262 may cover high voltage gate structures in the secondarea II. Each high voltage gate structure may include a gate insulationlayer 207, a lower electrode 212, a second dielectric layer pattern 237,and a first upper electrode 242. Here, the first upper electrode 242passes through the second dielectric layer pattern 237 to be connectedwith the lower electrode 212.

The third masks 263 may be positioned on a portion of the fourthconductive layer 255 between the first and the second areas I and II.One of the third masks 263 may be adjacent to an outermost cell gatestructure in the first area I, whereas the other of the third masks 264may be adjacent to an outermost high voltage gate structure in thesecond area II.

The fourth conductive layer 255 and a third conductive layer 250 may beetched using the first to the third masks 261, 262, and 263 as etchingmasks. Further, a sacrificial spacer 232 and a second upper insulationlayer pattern 229 may be removed from the second area II while partiallyetching the fourth conductive layer 255 and the third conductive layer250. As a result, cell transistors and high voltage transistors may beformed in the first and the second areas I and II while forming twopreliminary buried shield structures 273 on the third isolation layerpattern 224, the two preliminary buried shield structures being betweenthe first and the second areas I and II.

Each of the cell transistors may include the tunnel insulation layer206, the floating gate 211, the first dielectric layer pattern 236, thefirst spacer 231, and a control gate structure 270. The control gatestructure 270 may include the first control gate 241, a second controlgate 251, and a third control gate 256. The second and the third controlgates 251 and 256 maybe formed by etching the third and the fourthconductive layers 250 and 255. A first upper insulation layer pattern227 may be provided between adjacent cell transistors in the first areaI. Each of the high voltage transistors may include the gate insulationlayer 207, the lower electrode 212, the second dielectric layer pattern237, and an upper electrode structure 272. The upper electrode structure272 may include the first upper electrode 242, a second upper electrode252 and a third upper electrode 257. The second and the third upperelectrodes 252 and 257 may also be formed by partially etching the thirdand the fourth conductive layers 250 and 255. Each of the preliminaryburied shield structures 273 may include a first pattern 253, a secondpattern 258, and the third mask 263. The first and the second patterns253 and 258 may be formed by partially etching the third and the fourthconductive layers 250 and 255.

Referring to FIG. 21, the first to the third photoresist patterns 266,267 and 268 may be removed from the first to the third masks 261, 262and 263, respectively. The first to the third photoresist patterns 266,267 and 268 may be removed by an ashing process and/or a strippingprocess. Then, each of the third masks 263 may be partially removed toform a third pattern 264 on the second pattern 258. Thus, two buriedshield structures 274 may be provided between the first and the secondareas I and II.

In example embodiments, the nitride film and the organic material filmof the mask layer 260 may be etched when the third masks 263 arepartially removed, so that the third patterns 264 may have a heightsubstantially smaller than those of the third masks 263, respectively.

A second spacer 271 may be formed on a sidewall of the high voltagetransistor, and third spacers 276 are formed on sidewalls of the buriedshield structures 274. The second and the third spacers 271 and 276 maybe formed using a material having an etching selectivity relative to aconductive material such as metal or metal compound. For example, thesecond and the third spacers 271 and 276 may include a nitride, e.g.,silicon nitride or an oxynitride, e.g., silicon oxynitride.Alternatively, the second and the third spacers 271 and 276 may beformed using an oxide, e.g., middle temperature oxide.

An etch stop layer 275 may be formed over the substrate 200 to cover thecell transistors, the buried shield structures 274, and the high voltagetransistors. The etch stop layer 275 may be conformally formed alongprofiles of the cell transistors, the buried shield structures 274 andthe high voltage transistors. The etch stop layer 275 may be formedusing a material that has an etching selectivity with respect to oxide.For example, the etch stop layer 275 may include silicon nitride orsilicon oxynitride.

Referring to FIG. 22, an insulation interlayer 280 may be formed on theetch stop layer 275 to sufficiently cover the cell transistors, theburied shield structures 274, and the high voltage transistors. Theinsulation interlayer 280 may be formed using an oxide, e.g., siliconoxide, by a CVD process, a PECVD process, an HDP-CVD process, etc.

In example embodiments, the insulation interlayer 280 may have amultilayer structure that includes more than two oxide films. Forexample, the insulation interlayer 280 may be obtained by forming asecond oxide film on a first oxide film after forming the first oxidefilm on the etch stop layer 275. Here, the first and the second oxidefilms may be formed by PECVD processes and HDP-CVD processes,respectively. The first oxide film may have a thickness of about 2,000 Åand the second oxide film may have a thickness of about 6.000 Å. Theinsulation interlayer 280 may be planarized to ensure a flat upper facethereof, e.g., through a CMP process and/or an etch-back process.

Referring to FIG. 23, after the insulation interlayer 280 is partiallyetched to form a first contact hole and second contact holes, an upperconductive layer (not illustrated) may be formed on the insulationinterlayer 280 to fill up the first and the second contact holes. Theupper conductive layer may be formed using a metal and/or a metalcompound. The first contact hole may expose a portion of the second areaII adjacent to the high voltage transistor. For example, the firstcontact hole may expose source/drain regions of the high voltagetransistor. Each second contact hole may expose a corresponding secondpattern 258 of the buried shield structures 274.

When the upper conductive layer is removed until the insulationinterlayer 280 is exposed, a first contact 285 and second contacts 286may be formed in the first contact hole and the second contact holes,respectively. Here, upper conductive lines may be provided on theinsulation interlayer 280 while forming the first and the secondcontacts 285 and 286.

According to example embodiments, a plurality of buried shieldstructures 274 may be provided between the first area I and the secondarea II, so that an inversion of the flash memory device may beeffectively prevented to thereby improve electrical characteristics ofthe flash memory device. Namely, a breakdown of the flash memory devicemay be considerably prevented to improve the electrical characteristicsof the flash memory device because two buried shield structures 274 areprovided between the cell transistors and the high voltage transistors.When two or more buried shield structures are formed between adjacenthigh voltage transistors, the semiconductor device including the buriedshield structures and the high voltage transistors may ensure highelectrical performance without an electrical failure such as abreakdown, a leakage current, etc.

FIGS. 24 to 28 illustrate cross-sectional views of stages in a method ofmanufacturing a semiconductor device in accordance with exampleembodiments. In the method of the semiconductor device illustrated inFIGS. 24 to 28, processes up to a mask layer 360 are substantially thesame as or substantially similar to those described with reference toFIGS. 1 to 13, and details thereof will not be repeated.

Referring to FIG. 24, a first photoresist pattern 366, a secondphotoresist pattern 367, and a third photoresist pattern 368 may beprovided on the mask layer 360. The first photoresist pattern 366 maycover a first area I of a substrate 300. The second photoresist pattern367 may partially cover a second area II of the substrate 300. The thirdphotoresist pattern 368 may be on a portion of the mask layer 360between the first and the second areas I and II. The third photoresistpattern 368 may be closer to an outermost high voltage gate structurethan to an outermost cell gate structure.

In example embodiments, the mask layer 360 may have a multilayerstructure. For example, the mask layer 360 may include an oxide filmformed on a fourth conductive layer 355, an organic material film formedon the oxide film, and a nitride film formed on the organic film. Theoxide film may be formed using silicon oxide by a PECVD process or anHDP-CVD process. The oxide film may have a thickness of about 2,000 Å toabout 3,000 Å. The organic material film may include carbon obtained bya CVD process. The organic material film may have a thickness of about2,000 Å to about 3,000 Å. The nitride film may be formed using siliconnitride obtained by a CVD process or a PECVD process. The nitride filmmay have a thickness of about 300 Å to about 500 Å. A planarizationprocess may be performed on the mask layer 360 to ensure a level upperface of the mask layer 360.

The first photoresist pattern 366 may have a width substantially largerthan that of the second photoresist pattern 367 and that of the thirdphotoresist pattern 368. Additionally, the second photoresist pattern367 may also have a width substantially larger than that of the thirdphotoresist pattern 368. Since the third photoresist pattern 368 may becloser to the second area II than the first area I, a buried shieldstructure 374 (see FIG. 26) is adjacent, i.e., closer, to an outermosthigh voltage transistor in the second area II.

Referring to FIG. 25, the mask layer 360 is etched using the first tothe third photoresist patterns 366, 367, and 368 as etching masks. Thus,a first mask 361, a second mask 362, and a third mask 363 are formed onthe fourth conductive layer 355. In an etching process for forming thefirst to the third masks 361, 362 and 363, an etching end point may bedetermined based on exposure of the substrate 300 or a second isolationlayer pattern 323 and a third isolation layer pattern 324.

The first mask 361 may cover cell gate-structures in the first area I.Each cell structure may include a tunnel insulation layer 306, afloating gate 311, a first dielectric layer pattern 336, a first spacer331, and a first control gate 341.

The second mask 362 may cover high voltage gate structures in the secondarea II. Each high voltage gate structures may include a gate insulationlayer 307, a lower electrode 312, a second dielectric layer pattern 337,and a first upper electrode 342. The first upper electrode 342 may passthrough the second dielectric layer pattern 337 to be connected with thelower electrode 312.

The third mask 363 may be positioned on a portion of the fourthconductive layer 355 adjacent to an outermost high voltage gatestructure. Hence, the third mask 263 may be further from an outermostcell gate structure in comparison with an outermost high voltage gatestructure.

The fourth conductive layer 355 and a third conductive layer 350 may bepartially etched using the first to the third masks 361, 362, and 363 asetching masks. Additionally, a sacrificial spacer 332 and a second upperinsulation layer pattern 329 are removed from the second area II whilepartially etching the fourth and the third conductive layers 355 and350. Therefore, a preliminary buried shield structure 373 on the thirdisolation layer pattern 324 between the first and the second areas I andII may be formed while forming cell transistors and high voltagetransistors in the first and the second areas I and II.

Each of the cell transistors may include the tunnel insulation layer306, the floating gate 311, the first dielectric layer pattern 336, thefirst spacer 331, and a control gate structure 370. The control gatestructure 370 may include the first control gate 341, a second controlgate 351 and a third control gate 356 in which the second and the thirdcontrol gates 351 and 356 are formed by etching the third and the fourthconductive layers 350 and 355. A first upper insulation layer pattern327 may be between adjacent cell transistors in the first area I.

Each of the high voltage transistors may include the gate insulationlayer 307, the lower electrode 312, the second dielectric layer pattern337, and an upper electrode structure 372. The upper electrode structure372 may include the first upper electrode 342, a second upper electrode352, and a third upper electrode 357, wherein the second and the thirdupper electrodes 352 and 357 may also be formed by partially etching thethird and the fourth conductive layers 350 and 355. The preliminaryburied shield structure 373 may include a first pattern 353, a secondpattern 358 and the third mask 363. The first and the second patterns353 and 358 may also be obtained by partially etching the third and thefourth conductive layers 350 and 355.

Referring to FIG. 26, after removing the first to the third photoresistpatterns 366, 367, and 368 from the first to the third masks 361, 362,and 363, e.g., by an ashing process and/or a stripping process, thethird mask 363 may be partially removed to form a third pattern 364 onthe second pattern 358. Hence, the buried shield structures 374 areformed between the first and the second areas I and II. Here, the buriedshield structures 374 may be adjacent to the outermost high voltagetransistor in comparison with the outermost cell transistor as describedabove. In example embodiments, the nitride film and the organic materialfilm of the mask layer 360 may be etched when the third mask 363 ispartially removed. Thus, the third pattern 364 may have a heightsubstantially smaller than that of the third mask 363.

A second spacer 371 may be formed on a sidewall of the high voltagetransistor. Third spacers 376 may be formed on a sidewall of the buriedshield structure 374. The second and the third spacers 371 and 376 maybe formed using a material having an etching selectivity relative to aconductive material such as metal or metal compound. For example, thesecond and the third spacers 371 and 376 may include oxide such asmiddle temperature oxide.

An etch stop layer 375 may formed over the substrate 300 to cover thecell transistors, the buried shield structure 374, and the high voltagetransistors. The etch stop layer 375 may be conformally formed alongprofiles of the cell transistors, the buried shield structure 374 andthe high voltage transistors. The etch stop layer 375 may be formedusing a material that has an etching selectivity with respect to oxide.For example, the etch stop layer 375 may include silicon nitride orsilicon oxynitride.

Referring to FIG. 27, an insulation interlayer 380 is formed on the etchstop layer 375 to sufficiently cover the cell transistors, the buriedshield structure 374 and the high voltage transistors. The insulationinterlayer 380 may be formed using an oxide, e.g., silicon oxide, by aCVD process, a PECVD process, an HDP-CVD process, etc. In exampleembodiments, the insulation interlayer 380 may have a multilayerstructure that includes more than two oxide films. For example, theinsulation interlayer 380 may be obtained by forming a second oxide filmon a first oxide film after forming the first oxide film on the etchstop layer 375. Here, the first and the second oxide films may be formedby PECVD processes or HDP-CVD processes, respectively. The first oxidefilm may have a thickness of about 2,000 Å and the second oxide film mayhave a thickness of about 6,000 Å. The insulation interlayer 380 may beplanarized to ensure a flat upper face thereof through a CMP processand/or an etch-back process.

Referring to FIG. 28, the insulation interlayer 380 may be partiallyetched to form a first contact hole and a second contact hole, and thenan upper conductive layer (not illustrated) may be formed on theinsulation interlayer 380 to fill up the first and the second contactholes. The upper conductive layer may be formed using a metal and/or ametal compound. The first contact hole may expose a portion of thesecond area II adjacent to the high voltage transistor. For example, thefirst contact hole may expose source/drain regions of the high voltagetransistor. The second contact hole may expose the second pattern 358 ofthe buried shield structure 374.

When the upper conductive layer is removed until the insulationinterlayer 380 is exposed, a first contact 385 and a second contact 386may be formed in the first contact hole and the second contact hole,respectively. Here, upper conductive lines may be provided on theinsulation interlayer 380 while forming the first and the secondcontacts 385 and 386.

According to example embodiments, the buried shield structure 374 may beprovided closer to the high voltage transistor rather than to the celltransistor, such that an inversion of the flash memory device may bemore effectively prevented, thereby improving electrical characteristicsof the flash memory device. A breakdown of the flash memory device maybe effectively prevented to enhance electrical characteristics of theflash memory device because the buried shield structure 374 is providedcloser to the high voltage transistor in comparison with the celltransistor. When the buried shield structure 374 is positioned adjacentto the high voltage transistor, the flash memory device including theburied shield structure 374 and the high voltage transistor may have ahigh electrical performance by preventing an electrical failure such asa breakdown, a leakage current, etc.

FIGS. 29 to 44 illustrate cross-sectional views of stages in a method ofmanufacturing a semiconductor device in accordance with exampleembodiments. First transistors, e.g., cell transistors, may be formed ina first area I of a substrate 400, and second transistors, e.g., highvoltage transistors, may be formed in a second area II of the substrate400. Although FIGS. 29 to 44 illustrate a method of manufacturing aflash memory device, the features and advantages of the invention may beemployed in other nonvolatile semiconductor devices or volatilesemiconductor devices.

Referring to FIG. 29, a first insulation layer 405 may be formed on thesubstrate 400 having the first and the second areas I and II. Thesubstrate 400 may include a semiconductor substrate, e.g., a singlecrystalline silicon substrate, a single crystalline germanium substrate,a silicon-germanium substrate, etc. The substrate 400 may include an SOIsubstrate, a GOI substrate, etc. The first insulation layer 405 mayinclude an oxide and/or a metal oxide by a radical oxidation process, aCVD process, an ALD process, a sputtering process, a PLD process, etc.When the first insulation layer 405 is obtained by the radical oxidationprocess, the first insulation layer 405 may sufficiently ensure adesired structure and electrical characteristics for the tunnelinsulation layer in the flash memory device.

In example embodiments, impurities may be doped into the first and thesecond areas I and II of the substrate 400 to form desired wells atpredetermined portions of the substrate 400 considering electricalcharacteristics of the cell transistors and the high voltage transistorsto be formed thereon. For example, P type and N type impurities may beimplanted into the first and the areas I and II of the substrate 400 toform a P type well and an N type well in the first area I and the secondarea II, respectively.

A first conductive layer 410 may be formed on the first insulation layer405. The first conductive layer 410 may be formed using polysilicon, ametal and/or a metal compound by a CVD process, an ALD process, a PECVDprocess, a sputtering process, a PLD process, an evaporation process,etc. In one example embodiment, the first conductive layer 410 may beformed by a PECVD process using polysilicon doped with impurities whenthe flash memory device is formed on the substrate 400.

In example embodiments, the first conductive layer 410 may have amultilayer structure having a thickness of about 500 Å to about 1,500 Åmeasured from an upper face of the first insulation layer 405. In theformation of the first conductive layer 410, a first conductive film maybe formed on the first insulation layer 405, and then a secondconductive film may be formed on the first conductive film. The firstconductive film may have a thickness of about 200 Å to about 500 Å andthe second conductive film may have a thickness of about 300 Å to about1,000 Å.

A hard mask layer 415 may be provided on the first conductive layer 410.The hard mask layer 415 may be formed using a material that has anetching selectivity relative to the first conductive layer 410, thefirst insulation layer 405 and the substrate 400. For example, the hardmask layer 415 may include silicon nitride, silicon oxynitride, titaniumoxynitride, etc. Alternatively, the hard mask layer 415 may have amultilayer structure that includes an oxide film, a nitride film, anorganic material film and/or an oxynitride film. For example, the hardmask layer 415 may include an oxide film, a lower nitride film, anorganic material film and an upper nitride film.

Referring to FIG. 30, a first hard mask 416 and a second hard mask 417may be formed on the first conductive layer 410 by partially etching thehard mask layer 415. The first hard mask 416 may be positioned in thefirst area I of the substrate 400, whereas the second hard mask 417 maybe located in the second area II of the substrate 400. The second hardmask 417 may have a width substantially larger than an individual firsthard mask 416 when the high voltage transistor is formed in the secondarea II of the substrate 400.

The first conductive layer 410 and the first insulation layer 405 may bepartially etched using the first and the second hard masks 416 and 417as etching masks, so that a floating gate 411, a lower electrode 412, atunnel insulation layer pattern 406, and a gate insulation layer pattern407 are formed on the substrate 400. The tunnel insulation layer pattern406 and the floating gate 411 may be formed in the first area I, and thegate insulation layer pattern 407 and the lower electrode 412 may beformed in the second area II. Thus, a first conductive structure and asecond conductive structure may be provided in the first area I and thesecond area II, respectively. The first conductive structure may includethe tunnel insulation layer pattern 406, the floating gate 411, and thefirst hard mask 416. The second conductive structure may include thegate insulation layer pattern 407, the lower electrode 412 and thesecond hard mask 417. In example embodiments, the tunnel insulationlayer pattern 406 and the floating gate 411 may have widthssubstantially smaller than those of the gate insulation layer pattern407 and the lower electrode 412, respectively. Further, the floatinggate 411 and the lower electrode 412 may be simultaneously formed byperforming one etching process, although the floating gate 411 may havedimensions substantially different from those of the lower electrode412. Adjacent first conductive structures in the first area I may bedisposed at an interval substantially smaller that an interval betweenadjacent second conductive structures in the second area II.

Referring to FIG. 31, the substrate 400 may be partially etched usingthe first and the second conductive structures as etching masks, suchthat a first trench (filled), a second trench (filled), and a thirdtrench (filled) may be formed on the substrate 400. The first trench maybe formed between adjacent first conductive structures. The secondtrench may be formed between adjacent the second conductive structures.Further, the third trench may be formed between the first area I and thesecond area II. Namely, the third trench may be formed between anoutermost first conductive structure and an outermost second conductivestructure. The second trench may have a width substantially larger thanthat of the first trench, and the third trench may have a widthsubstantially the same as or substantially similar to that of the secondtrench. However, the first trench may have a depth substantially thesame as, or substantially similar to, those of the second and the thirdtrenches. Each of the first to the third trenches may have a depth ofabout 2,000 Å to about 4,000 Å measured from the upper face of thesubstrate 400.

A first isolation layer 420, a second isolation layer 421, and a thirdisolation layer 422 may be formed on the substrate 400 to fill up thefirst trench, the second trench and the third trench, respectively. Eachof the first to the third isolation layers 420, 421 and 422 may beformed by an STI process, a thermal oxidation process, a CVD process, anHDP-CVD process, etc. The first to the third isolation layers 420, 421and 422 may be formed using oxide. The first isolation layer 420 mayelectrically insulate adjacent cell transistors in the first area I. Thesecond isolation layer 421 may electrically insulate adjacent highvoltage transistors in the second area II. The third isolation layer 422may electrically insulate the cell transistor from the high voltagetransistor between the first and the second areas I and II.

In example embodiments, field impurities may be doped into portions ofthe substrate 400 where the first to the third trenches are formedbefore forming the first to the third trenches on the substrate 400.Hence, electrical insulation characteristics of the first to the thirdisolation layers 420, 421 and 422 may be enhanced due to the fieldimpurities.

After a second insulation layer 425 is formed on the substrate 400 tocover the first and the second conductive structures, the secondinsulation layer 425 may be partially etched until the first and thesecond hard masks 416 and 417 are exposed. The second insulation layer425 may be partially removed by a CMP process and/or an etch-backprocess. The second insulation layer 425 may be formed using siliconoxide by a CVD process, an LPCVD process, a spin coating process, aPECVD process, an HDP-CVD process, etc.

Referring to FIG. 32, the second insulation layer 425 may be etched toform an upper insulation layer 426 on the substrate 400. The upperinsulation layer 426 may cover lower sidewalls of the floating gate 411and the lower electrode 412, and may cover the third isolation layer 422between the first and the second areas I and II. After the formation ofthe upper insulation layer 426, sidewalls of the first and the secondconductive structures may be exposed.

Referring to FIG. 33, a spacer formation layer 430 may be formed on theupper insulation layer 426 to cover the first and the second conductivestructures. The spacer formation layer 430 may be formed using middletemperature oxide or silicon oxynitride by a CVD process, an LPCVDprocess, a PECVD process, an HDP-CVD process, etc. A gap betweenadjacent first conductive structures may be filled with the spacerformation layer 430 when the spacer formation layer 430 has a sufficientthickness, e.g., substantially larger than a half of a width of the gapbetween adjacent first conductive structures. When the spacer formationlayer 430 fills up the gap between adjacent first conductive structures,a recess 434 (see FIG. 34) may be formed between the first area I andthe second area II while etching the spacer formation layer 430.

Referring to FIG. 34, the spacer formation layer 430 may beanisotropically etched to form a first spacer 431 and a sacrificialspacer 429. The first and the sacrificial spacers 431 and 429 may bepositioned to enclose the lower sidewalls of the first and the secondconductive structures, respectively. In etching the spacer formationlayer 430, the second isolation layer 421 and the third isolation layer422 may be partially etched, such that a second isolation layer pattern423 and a third isolation layer pattern 424 may be formed in the secondtrench and the third trench, respectively. The upper insulation layer426 may be removed while forming the first and the sacrificial spacers431 and 429. The second and the third isolation layer patterns 423 and424 may be positioned on lower faces and sidewalls of the second and thethird trenches, respectively.

In example embodiments, the first and the sacrificial spacers 431 and429 may increase a coupling ratio of the flash memory device. Thecoupling ratio of the flash memory device may mainly depend on theamount of charge between the floating gate 411 and a control gatestructure 470 (see FIG. 41) of the flash memory device. Hence, thecoupling ratio of the flash memory device may increase in accordancewith the increase of the area between the floating gate 411 and thecontrol gate structure 470. When the first and the sacrificial spacers431 and 429 are positioned on the lower sidewalls of the first and thesecond conductive structures, the flash memory device may have anincreased coupling ratio in comparison with that of the conventionalflash memory device.

Referring to FIG. 35, a dielectric layer 435 may be formed on theresultant structures to cover the floating gate 411 and the lowerelectrode 412 after removing the first and the second masks 416 and 417from the floating gate 411 and the lower electrode 412. The dielectriclayer 435 may further cover the first spacer 431, the sacrificial spacer429, the second isolation pattern 423, and the third isolation layerpattern 424. The dielectric layer 435 may be conformally formed on theresultant structures.

In example embodiments, the dielectric layer 435 may be formed using amaterial that increases the coupling ratio of the flash memory device.When the dielectric layer 435 includes a material having a dielectricconstant substantially larger than those of the tunnel insulation layerpattern 406 and the gate insulation layer pattern 408, the flash memorydevice may have a considerably increased coupling ratio. For example,the dielectric layer 435 may be formed using a metal compound such ashafnium oxide (HfOx), aluminum oxide (AlOx), tantalum oxide (TaOx),zirconium oxide (ZrOx), etc. Alternatively, the dielectric layer 435 mayhave a multilayer structure that includes a lower oxide film, a nitridefilm and an upper oxide film. The dielectric layer 435 may have athickness of about 100 Å to about 200 Å.

Referring to FIG. 36, a second conductive layer 440 may be formed on thedielectric layer 435. The second conductive layer 440 may also beconformally formed on the dielectric layer 435 along the profiles of theresultant structures on the substrate 400. The second conductive layer440 may be formed using polysilicon, a metal and/or a metal compound bya CVD process, an ALD process, a PECVD process, a sputtering process, aPLD process, an evaporation process, etc. The second conductive layer440 may have a thickness of about 500 Å to about 1,000 Å based on anupper face of the dielectric layer 435.

Referring to FIG. 37, a first butting mask 446 and a second butting mask447 may be provided on the second conductive layer 440 in the first andthe second areas I and II, respectively. The first butting mask 446 maycover the first conductive structures in the first area I. The secondbutting mask 447 may partially cover the second conductive structures inthe second area II. A central portion of the second conductive structuremay be exposed through the second butting mask 447, so that a portion ofthe second conductive layer 440 is exposed by the second butting mask447. Further, a portion of the second conductive layer 440 between thefirst and the second areas I and II may be exposed after formations ofthe first and the second butting masks 446 and 447. That is, a portionof the second conductive layer 440 positioned over the third isolationlayer pattern 424 may be exposed when the first and the second buttingmasks 446 and 447 are formed.

The second conductive layer 440 and the dielectric layer 435 may beetched using the first and the second butting masks 145 and 146 asetching masks. Additionally, portions of the second conductive layer440, the dielectric layer 435, and the lower electrode 412 in the secondarea II may be etched while partially removing the second conductivelayer 440 and the dielectric layer 435. Hence, a first dielectric layerpattern 436 and a first control gate 441 may be formed in the first areaI, and a preliminary second dielectric layer pattern 437 and a firstupper electrode 442 may be formed in the second area II. When the lowerelectrode 412 is partially etched, a dent or a recess may be provided onthe lower electrode 412.

In example embodiments, the first dielectric layer pattern 436 may coverthe floating gate 411 and the first spacer 431 in the first area I.Further, the first dielectric layer pattern 436 may cover all of thefloating gates and the first spacers in the first area I. That is, thecell transistors in the first area I may share one common firstdielectric layer pattern 436. Similarly, the cell transistors may alsoshare one first control gate 441 formed on the first dielectric layerpattern 436. However, the high voltage transistors in the second area IImay not share one common dielectric layer pattern. That is, thepreliminary second dielectric layer pattern 437 may be separated fromadjacent preliminary second dielectric layer pattern. The preliminarysecond dielectric layer pattern 437 may cover the sacrificial spacer 429and the lower electrode 412, and the first upper electrode 442 may bepositioned on the preliminary second dielectric layer pattern 437. Inthe reading and erasing operations of the flash memory device, chargesmay not be stored in the lower electrode 412 of the second conductivestructure, so that the lower electrode 412 and the first upper electrode442 may make contact with upper electrodes successively formed.

Referring to FIG. 38, after the first and the second butting masks 446and 447 may be removed from the first control gate 441 and the firstupper electrode 442, a third conductive layer 450 may be formed on thefirst control gate 441, the third isolation layer pattern 424, and thefirst upper electrode 442. The third conductive layer 450 may fill upthe dent or the recess exposing the lower electrode 412. Thus, the thirdconductive layer 550 may make contact with the lower electrode 412.

The third conductive layer 450 may be formed using polysilicon, a metaland/or a metal compound by a CVD process, an ALD process, a PECVDprocess, a sputtering process, a PLD process, an evaporation process,etc. The third conductive layer 450 may have a thickness of about 500 Åto about 1,000 Å.

In example embodiments, the third conductive layer 450 may include amaterial substantially the same as, or substantially similar to, that ofthe second conductive layer 440 and/or that of the first conductivelayer 410. Alternatively, the first to the third conductive layers 410,440 and 450 may be formed using different materials, respectively.

Referring to FIG. 39, a fourth conductive layer 455 may be formed on thethird conductive layer 450. The third and the fourth conductive layers450 and 455 may be conformally formed along profiles of the resultantstructures on the substrate 400. The fourth conductive layer 455 may beformed using a metal and/or a metal compound by a CVD process, a PECVDprocess, a sputtering process, a PLD process, an evaporation process,etc. In one example embodiment, the fourth conductive layer 455 may havea multilayer structure that includes a tungsten film and a tungstensilicide film. The fourth conductive layer 455 may have a thickness ofabout 500 Å to about 1,000 Å based on an upper face of the thirdconductive layer 450.

In some example embodiments, a thermal treatment process may beperformed on the substrate 400 having the fourth conductive layer 455,the third conductive layer 450, and the lower electrode 412. The thermaltreatment process may improve adhesion strengths between the fourthconductive layer 455 and the third conductive layer 450 and between thefourth conductive layer 455 and the lower electrode 412. Additionally,contact resistances among the fourth conductive layer 455, the thirdconductive layer 450 and the lower electrode 412 may be reduced becauseof the thermal treatment process. The thermal treatment process may beexecuted at a temperature below about 850° C. under an atmosphereincluding nitrogen.

Referring to FIG. 40, a mask layer 460 may be formed on the fourthconductive layer 455. The mask layer 460 may have a predeterminedthickness to fully fill up the recess 434 positioned over the thirdisolation layer pattern 424 between the first and the second areas I andII. The mask layer 460 may be formed using an oxide, a nitride and/or anorganic material by a CVD process, a PECVD process, an HDP-CVD process,etc. For example, the mask layer 460 may include silicon oxide, siliconnitride, carbon, etc.

In example embodiments, the mask layer 460 may have a multilayerstructure. For example, the mask layer 460 may include an oxide film, acarbon film and a nitride film. Here, the oxide film may have athickness of about 2,000 Å to about 3,000 Å, and the carbon film mayalso have a thickness of about 2,000 Å to about 3,000 Å. Further, thenitride film may have a thickness of about 500 Å to about 1,000 Å. Thenitride film may also serve as an antireflective layer. The mask layer460 may be planarized by a planarization process to ensure a level upperface thereof.

A first photoresist pattern 465, a second photoresist pattern 466, and athird photoresist pattern 467 may be formed on the mask layer 460. Thefirst photoresist pattern 465 may be formed on a first portion of themask layer 460 in the first area I. The second photoresist pattern 466may be formed on a second portion of the mask layer 460 in the secondarea II. The third photoresist pattern 467 may be formed on a thirdportion of the mask layer 460 between the first and the second areas Iand II.

In example embodiments, the first photoresist pattern 465 may have awidth substantially larger than that of the second photoresist pattern466 and that of the third photoresist pattern 467. Further, the secondphotoresist pattern 466 may have a width substantially wider than thatof the third photoresist pattern 467.

Referring to FIG. 41, the mask layer 460 may be etched using the firstto the third photoresist patterns 465, 466 and 467 as etching masks.Hence, a first mask 461, a second mask 462, and a third mask 463 may beformed on the fourth conductive layer 455. The first mask 461 may beformed on a first portion of the fourth conductive layer 455 in thefirst area I. The second mask 462 may be formed on a second portion ofthe fourth conductive layer 455 in the second area II. The third mask463 may be formed on a third portion of the fourth conductive layer 455between the first and the second areas I and II. Therefore, gatestructures may be provided in the second area II while forming the celltransistors in the first area I. Each gate structure may include a firstupper electrode 442, the second dielectric layer pattern 437, the lowerelectrode 412, and the gate insulation layer pattern 407.

In accordance with the dimensions of the first to the third photoresistpatterns 465, 466 and 467, the first mask 461 may have a widthsubstantially larger than those of the second and the third masks 462and 463, and the second mask 462 may also have a width substantiallywider than that of the third mask 463.

The fourth conductive layer 455 and the third conductive layer 450 maybe etched using the first to the third masks 461, 462 and 463 andetching masks to thereby form a control gate structure 470, an upperelectrode structure 471, and a preliminary buried shield structure 472.The control gate structure 470 may be on the first dielectric layerpattern 436 in the first area I. The upper electrode structure 471 maybe on the lower electrode 412 and the second dielectric layer pattern437 in the second area II. The preliminary buried shield structure 472may be on the third isolation layer pattern 424 between the first andthe second areas I and II.

The control gate structure 470 may include the first control gate 441, asecond control gate 451, and a third control gate 456. The second andthe third control gates 451 and 452 may be formed by etching portions ofthe third and the fourth conductive layers 450 and 455 in the first areaI. As described above, the cell transistors may additionally share thesecond control gate 451 and the third control gate 456. The upperelectrode structure 472 may include the first upper electrode 442, asecond upper electrode 452, and a third upper electrode 457. The secondand the third upper electrodes 452 and 457 may be formed by etchingportions of the third and the fourth conductive layers 450 and 455 inthe second area II. Because the first upper electrode 442 is inelectrical contact with the lower electrode 412, the upper electrodestructure 472 may be electrically connected to the lower electrode 412.

The preliminary buried shield structure 472 may include a first pattern453, a second pattern 458, and the third mask 463. The first pattern 453may be positioned on the third isolation layer pattern 424. The firstpattern 453 and the second pattern 458 may be formed by etching portionsof the third conductive layer 450 and the fourth conductive layer 455between the first and the second areas I and II. The preliminary buriedshield structure 472 may be formed together with the cell transistorsand the high voltage gate structures without any additional process.

In example embodiments, the sacrificial spacer 429 may be removed in theformation of the high voltage gate structures in the second area II.Further, widths of the lower electrode 412, the second dielectric layerpattern 437, and the first upper electrode 442 may be reduced becausethe lower electrode 412, the second dielectric layer pattern 437, andthe first upper electrode 442 may be partially etched while forming thehigh voltage gate structures in the second area II.

Referring to FIG. 42, the third mask 463 of the preliminary buriedshield structure 472 may be partially removed to form a third pattern464 on the second pattern 458. When the third mask 463 has the carbonfilm and the nitride film, the carbon and the nitride films may beremoved to form the third pattern 464 having a thickness considerablysmaller than that of the third mask 463, so that a buried shieldstructure 473 may have a height considerably smaller than that of thepreliminary buried shield structure 472. The buried shield structure 473may include the first to the third patterns 453, 458 and 464, and asidewall spacer 476 on a sidewall thereof.

A second spacer 474 may be formed on a sidewall of the high voltage gatestructure in the second area II. The high voltage transistor may includethe gate insulation layer pattern 407, the lower electrode 412, thesecond dielectric layer pattern 437, the upper electrode structure 471,the second mask 462, and the second spacer 474.

In example embodiments, the second spacer 474 and the sidewall spacer476 may be formed using a nitride or an oxynitride, e.g., siliconnitride or silicon oxynitride. Alternatively, the second and thesidewall spacers 474 and 476 may be formed using an oxide, e.g., siliconoxide, such as middle temperature oxide.

Referring to FIG. 43, an etch stop layer 475 may be formed on thesubstrate 400 to cover the buried shield structure 473 and the highvoltage transistor except for the cell transistors in the first area I.The etch stop layer 475 may be conformally formed on the second and thethird isolation layer patterns 423 and 424 along profiles of the buriedshield structure 473 and the high voltage transistors. The etch stoplayer 475 may be formed using a nitride, e.g., silicon nitride. The etchstop layer 475 may have a thickness of about 200 Å to about 500 Åmeasured from upper faces of the second and the third isolation layerpatterns 423 and 424.

An insulation interlayer 480 may be formed on the etch stop layer 475 tocover the cell transistors. The insulation interlayer 480 may be formedusing silicon oxide by a CVD process, an LPCVD process, a PECVD process,an HDP-CVD process, etc. In the formation of the insulation interlayer480, a first oxide film may be formed on the etch stop layer 475 and thefirst mask 461, and then a second oxide film may be formed on the firstoxide film. The first oxide film may have a thickness of about 1,000 Åto about 2,000 Å, and the second oxide film may have a thickness offabout 4,000 Å to about 6,000 Å. Each of the first and the second oxidefilms may be formed by an HDP-CVD process. When the insulationinterlayer 480 has a multilayer structure, the insulation interlayer 480may effectively cover the cell transistors, the buried shield structure473 and the high voltage transistors without generations of voids orseams therein.

Referring to FIG. 44, the insulation interlayer 480 and the etch stoplayer 475 may be partially etched to form a first contact hole (filled)in the second area II. Additionally, the insulation interlayer 480, theetch stop layer 475 and the third pattern 464 are partially etched toform a second contact hole (filled) between the first and the secondareas I and II. The first contact hole may expose source/drain regionsof the high voltage transistor. The second contact hole may expose thesecond pattern 458 of the buried shield structure 473.

An upper conductive layer (not illustrated) may be formed on theinsulation interlayer 480 to fill up the first and the second contactholes. The upper conductive layer may be formed using a metal and/or ametal compound by a CVD process, a sputtering process, a PECVD process,a PLD process, an evaporation process, etc.

The upper conductive layer may be removed until the insulationinterlayer 480 is exposed, such that a first contact 485 and a secondcontact 486 are formed in the first contact hole and the second contacthole. Upper conductive lines may be provided on the insulationinterlayer 480 while forming the first and the second contacts 485 and486.

According to example embodiments, the buried shield structure 473 may beformed between the first and the second areas I and II, such that aninversion of the flash memory device may be prevented to thereby enhanceelectrical characteristics of the flash memory device. For example, thebreakdown of the flash memory device may be effectively prevented tothereby improve the electrical characteristics of the flash memorydevice because the buried shield structure 473 is positioned between thecell transistor and the high voltage transistor.

FIG. 45 illustrates a block diagram of a memory system in accordancewith example embodiments.

Referring to FIG. 45, the memory system may include a memory controller520 and a memory device 510 electrically connected to the memorycontroller 520. The memory device 510 may include a flash memory devicehaving at least one buried shield structure. Here, the flash memorydevice may be manufactured through any of the above-described processesaccording to embodiments. Alternatively, the memory device 510 mayinclude other non-volatile semiconductor memory devices or volatilesemiconductor devices, e.g., DRAM devices, SRAM devices, etc. The memorycontroller 520 may provide an input signal into the memory device 510 tocontrol the reading and the erasing operations of the memory device 510.For example, various signals such as command (CMD), address (ADD),input/output data (DQ) or a high-voltage (VPP) signal may be applied tothe memory controller 520. The memory controller 520 may control thememory device 510 based on the applied various signals. The memorysystem may be employed in various electronic apparatuses such as acellular phone, a portable multimedia player, a digital camera, etc.

FIG. 46 illustrates a block diagram of another memory system inaccordance with example embodiments.

Referring to FIG. 46, the memory system may be used in a portableelectronic apparatus 600. The portable electronic apparatus 600 mayinclude an MP3 player, a portable video player, a portable multimediaplayer, a digital camera, etc. The memory system in the portableelectronic apparatus 600 includes a memory device 510 and a memorycontroller 520. Further, the memory system includes an encoder/decoder(EDC) 610, a display member 620 and an interface 630. The memory device510 may include a flash memory device having at least one buried shieldstructure.

The EDC 610 may input/output data, e.g., audio data or video data,into/from the memory device 510 through the memory controller 520.Alternatively, the data may be directly input from the EDC 610 into thememory device 510 or may be directly output from the memory device 510into the EDC 610.

The EDC 610 may encode data stored in the memory device 510. Forexample, the EDS 610 may carry out encoding of MP3 files to store theaudio data in the memory device 510. Alternatively, the EDC 610 mayencode MPEG files to store video data into the memory device 510.Further, the EDS 610 may include a compound encoder for encodingdifferent file types of various data. For example, the EDC 610 mayinclude an MP3 encoder for the audio data and an MPEG encoder for thevideo data.

The EDC 610 may decode data stored in the memory device 510. Forexample, the EDC 610 may perform decoding of the MP3 files based on theaudio data stored in the memory device 510. Alternatively, the EDC 610may execute decoding of MPEG files from the video data stored in thememory device 510. Thus, the EDC 610 may include an MP3 decoder for theaudio data and an MPEG decoder for the video data.

In example embodiments, the EDC 610 may include a decoder without anencoder. For example, encoded data may be input into the EDC 610, andthen the encoded data may be directly stored into the memory device 510or may be stored into the memory device 510 through the memorycontroller 520 when the EDC 810 has the decoder only.

In example embodiments, the EDC 610 may receive data for encoding orencoded data through the interface 630. The interface 630 may meet apredetermined reference such as FireWire (1394) or USB. For example, theinterface 630 may include a FireWire interface or a USB interface.Further, the data stored in the memory device 510 may be output throughthe interface 630.

The display member 620 may display the data output from the memorydevice 510 or the decoded data from the EDC 610. For example, thedisplay member 620 may include a speaker jack to output the audio dataand/or a display screen to display the video data.

FIG. 47 illustrates a block diagram of still another memory system inaccordance with example embodiments.

Referring to FIG. 47, the memory system may include a memory device 510and a central processing unit (CPU) 810 in a computer system 800. Thememory device 510 may be electrically connected to the CPU 810. Forexample, the computer system 800 may include a personal computer, apersonal data assistant, etc. The memory device 510 may be directlyconnected to the CPU 810 or may be electrically connected to the CPU 810through a bus.

According to example embodiments, a semiconductor device having at leastone buried shield structure may be manufactured through simplifiedprocesses. Since the semiconductor device includes the buried shieldstructure formed at a predetermined position of a substrate, thesemiconductor device may ensure enhanced electronic characteristics andalso may have improved integration degree without electronic failuresthereof. Further, because a control gate structure and an upperelectrode structure have a multilayer structure, the semiconductordevice may have a high coupling ratio for achieving high storagecapacity. Finally, while the at least one buried shield structure hasbeen illustrated between a high voltage transistor and a celltransistor, the at least one buried shield structure may be betweenadjacent high voltage transistors.

Example embodiments of the invention have been disclosed herein, andalthough specific terms are employed, they are used and are to beinterpreted in a generic and descriptive sense only and not for purposeof limitation. Accordingly, it will be understood by those of ordinaryskill in the art that various changes in form and details may be madewithout departing from the spirit and scope of the invention as setforth in the following claims.

1. A semiconductor device, comprising: a substrate having a first areaand a second area; a first transistor in the first area; a secondtransistor in the second area; an isolation layer between the first areaand the second area; and at least one buried shield structure on theisolation layer between the first and the second areas.
 2. Thesemiconductor device as claimed in claim 1, wherein the first transistoris a cell transistor and the second transistor is a high voltagetransistor.
 3. The semiconductor device as claimed in claim 1, whereinthe buried shield structure comprises a first pattern, a second pattern,and a third pattern sequentially formed on the isolation layer.
 4. Thesemiconductor device as claimed in claim 3, wherein the buried shieldstructure further comprises a sidewall spacer on sidewalls of the firstto the third patterns.
 5. The semiconductor device as claimed in claim3, wherein the first pattern includes polysilicon, metal, and/or metalcompound.
 6. The semiconductor device as claimed in claim 5, wherein thefirst pattern includes at least one of polysilicon doped withimpurities, tungsten, titanium, aluminum, tantalum, tungsten nitride,tungsten silicide, titanium nitride, titanium silicide, aluminumnitride, titanium aluminum nitride, tantalum nitride, cobalt silicide,and zirconium silicide.
 7. The semiconductor device as claimed in claim3, wherein the second pattern includes polysilicon, metal and/or metalcompound.
 8. The semiconductor device as claimed in claim 3, wherein thethird pattern includes at least of silicon oxide, silicon nitride, andcarbon.
 9. The semiconductor device as claimed in claim 3, wherein: thefirst transistor includes; a tunnel insulation layer, a floating gate, afirst dielectric layer pattern, and a control gate structure having aplurality of control gates on the first dielectric layer pattern; andthe second transistor includes: a gate insulation layer, a lowerelectrode, a second dielectric layer pattern, and an upper electrodestructure having a plurality of upper electrodes.
 10. The semiconductordevice as claimed in claim 9, wherein the upper electrode structureelectrically contacts the lower electrode through the second dielectriclayer pattern.
 11. The semiconductor device as claimed in claim 9,wherein the plurality of control gates includes first and the secondcontrol gates including the same material as the first and the secondpatterns of the buried shield structure
 12. The semiconductor device asclaimed in claim 1, wherein a plurality of buried shield structures ison the isolation layer between the first and the second areas.
 13. Asemiconductor device, comprising: a substrate having a first area and asecond area; a plurality of cell transistors in the first area; aplurality of high voltage transistors in the second area; and at leastone buried shield structure between adjacent high voltage transistors.14.-20. (canceled)